Chapter
Apr 26, 2012
Improved Material Properties of Complex Oxide Thin Films for Application in Phased Array Antennas
Authors: M. W. Cole [email protected], E. Ngo, A. Podpirka, S. Ramanathan [email protected], M. Ivill, R. C. Toonen, S. G. Hirsch, and C. HubbardAuthor Affiliations
Publication: Earth and Space 2010: Engineering, Science, Construction, and Operations in Challenging Environments
Abstract
Ba0.60Sr0.40TiO3 (BST) thin films, grown via RF-sputtering and the metalorganic solution deposition (MOSD) techniques, were post-growth annealed via conventional thermal annealing (CTA) and UV-photon irradiation annealing. With respect to the conventional thermal annealed films the UV-photon irradiation annealed films possessed improved structural properties and dielectric response. The optimization of the UV-photon irradiation annealing process parameters was achieved via a detailed set of isothermal-isotemporal annealing experiments. The optimized UV-process parameters, applied to MOSD and RF sputtered BST films revealed enhanced structural materials response, i.e., a reduction in lattice parameter with extended UV-annealing time up to 225 min. The improvements in the material properties of the UV-photon irradiation annealed BST thin films are attributed to the mitigation of film of stress, hence reduction in oxygen vacancies via the UV-photon irradiation annealing process.
Get full access to this chapter
View all available purchase options and get full access to this chapter.
Information & Authors
Information
Published In
Earth and Space 2010: Engineering, Science, Construction, and Operations in Challenging Environments
Pages: 3444 - 3451
Copyright
© 2010 American Society of Civil Engineers.
History
Published online: Apr 26, 2012
Permissions
Request permissions for this article.
Authors
Affiliations
U.S. Army Research Laboratory, Weapons and Materials Research Directorate, Aberdeen Proving Ground, MD 21005. E-mail: [email protected]
E. Ngo
U.S. Army Research Laboratory, Weapons and Materials Research Directorate, Aberdeen Proving Ground, MD 21005
A. Podpirka
School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138
School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138. E-mail: [email protected]
M. Ivill
U.S. Army Research Laboratory, Weapons and Materials Research Directorate, Aberdeen Proving Ground, MD 21005
R. C. Toonen
U.S. Army Research Laboratory, Weapons and Materials Research Directorate, Aberdeen Proving Ground, MD 21005
S. G. Hirsch
U.S. Army Research Laboratory, Weapons and Materials Research Directorate, Aberdeen Proving Ground, MD 21005
C. Hubbard
U.S. Army Research Laboratory, Weapons and Materials Research Directorate, Aberdeen Proving Ground, MD 21005
Metrics & Citations
Metrics
Citations
Download citation
If you have the appropriate software installed, you can download article citation data to the citation manager of your choice. Simply select your manager software from the list below and click Download.
View Options
Get Access
Access content
Please select your options to get access
Log in/Register
Log in via your institution (Shibboleth)
ASCE Members:
Please log in to see member pricing
Purchase
Save for later Item saved, go to cart Information on ASCE Library Cards
ASCE Library Cards let you download journal articles, proceedings papers, and available book chapters across the entire ASCE Library platform. ASCE Library Cards remain active for 24 months or until all downloads are used. Note: This content will be debited as one download at time of checkout.
Terms of Use: ASCE Library Cards are for individual, personal use only. Reselling, republishing, or forwarding the materials to libraries or reading rooms is prohibited.
Terms of Use: ASCE Library Cards are for individual, personal use only. Reselling, republishing, or forwarding the materials to libraries or reading rooms is prohibited.
Get Access
Access content
Please select your options to get access
Log in/Register
Log in via your institution (Shibboleth)
ASCE Members:
Please log in to see member pricing
Purchase
Save for later Item saved, go to cart Information on ASCE Library Cards
ASCE Library Cards let you download journal articles, proceedings papers, and available book chapters across the entire ASCE Library platform. ASCE Library Cards remain active for 24 months or until all downloads are used. Note: This content will be debited as one download at time of checkout.
Terms of Use: ASCE Library Cards are for individual, personal use only. Reselling, republishing, or forwarding the materials to libraries or reading rooms is prohibited.
Terms of Use: ASCE Library Cards are for individual, personal use only. Reselling, republishing, or forwarding the materials to libraries or reading rooms is prohibited.