Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring
Publication: Journal of Aerospace Engineering
Volume 16, Issue 3
Abstract
The use of advanced embedded system technologies such as microelectromechanical system (MEMS) sensors and wireless communications hold great promise for measuring the response of civil structures to ambient and external disturbances. In this paper, the design of a high-performance, planar piezoresistive MEMS accelerometer is discussed in detail. The piezoresistive accelerometer possesses superior performance characteristics including low noise densities when measuring local structural responses characterized by high-frequency content. A low-cost wireless sensing unit, designed for automated structural monitoring, is utilized to record and wirelessly transmit measurements obtained by the piezoresistive accelerometer. To validate the performance of the wireless monitoring system including the interfaced piezoresistive accelerometer, a five degrees-of-freedom laboratory test structure is utilized.
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References
Celebi, M. (2001). “Draft proposal plan for seismic instrumentation of the cable-stayed Cape Girardeau (MO) Bridge.” Administrative Rep., United States Geological Survey, Menlo Park, Calif.
Davidson, A., and Hill, C.(1997). “Measurement of building penetration into medium buildings at 900 and 1500 MHz.” IEEE Trans. Veh. Technol., 46(1), 161–168.
Doebling, S. W., Farrar, C. R., Prime, M. B., and Shevitz, D. W. (1996). “Damage identification and health monitoring of structural and mechanical systems from changes in their vibration characteristics: A literature review.” Rep. No. LA-13070-MS, Los Alamos National Laboratory, Los Alamos, N.M.
Farrar, C. R. (2001). “Historical overview of structural health monitoring.” Lecture notes on structural health monitoring using statistical pattern recognition, Los Alamos Dynamics, Los Alamos, N.M.
Ginsberg, G. L. (1990). Printed circuit design featuring computer-aided technologies, McGraw-Hill, New York.
Judy, J. W.(2001). “Microelectromechanical systems (MEMS): Fabrica-tion, design and applications.” Smart Mater. Struct., 10(6), 1115–1134.
Lynch, J. P. (2002). “Decentralization of wireless monitoring and control technologies for smart civil structures.” PhD thesis, Dept. of Civil and Environmental Engineering, Stanford Univ., Stanford, Calif.
Lynch, J. P., Sundararajan, A., Law, K. H., Kiremidjian, A. S., Kenny, T. W., and Carryer, E. (2002). “Computational core design of a wireless structural health monitoring system.” Proc., 2nd Int. Conf. on Advances in Structural Engineering and Mechanics (ASEM’02), Korea Advanced Institute of Science and Technology, Pusan, Korea, 212–220.
Lyshevski, S. E. (2002). MEMS and NEMS systems, devices, and structures, CRC, Boca Raton, Fla.
Maluf, N. (2000). An introduction to microelectromechanical systems engineering, Artech House, Boston.
Ni, Y. Q., Wang, B. S., and Ko, J. M. (2001). “Simulation studies of damage location in Tsing Ma Bridge deck.” Proc., Nondestructive Evaluation of Highways, Utilities, and Pipelines IV, SPIE, Bellingham, Wash., 312–323.
Park, G., Cudney, H. H., and Inman, D. J.(2000). “Impedance-based health monitoring of civil structural components.” J. Infrastruct. Syst., 6(4), 153–160.
Partridge, A.et al. (2000). “A high-performance planar piezoresistive accelerometer.” J. Microelectromech. Syst., 9(1), 58–66.
Roylance, L. M., and Angell, J. B.(1979). “A batch fabricated silicon accelerometer.” IEEE Trans. Electron Devices, 26(12), 1911–1917.
Senturia, S. D. (2001). Microsystem design, Kluwer Academic, Boston.
Straser, E. G., and Kiremidjian, A. S. (1998). “A modular, wireless damage monitoring system for structures.” Rep. No. 128, John A. Blume Earthquake Engineering Center, Dept. of Civil and Environmental Engineering, Stanford Univ., Stanford, Calif.
Information & Authors
Information
Published In
Journal of Aerospace Engineering
Volume 16 • Issue 3 • July 2003
Pages: 108 - 114
Copyright
Copyright © 2003 American Society of Civil Engineers.
History
Received: Nov 27, 2002
Accepted: Nov 27, 2002
Published online: Jun 13, 2003
Published in print: Jul 2003
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