Applicability of Seismic Protective Systems to Structures with Vibration-Sensitive Equipment
Publication: Journal of Structural Engineering
Volume 130, Issue 11
Abstract
The paper summarizes the feasibility study of implementing seismic protective systems into high-tech industrial structures in which costly vibration-sensitive facilities are housed. Due to the fact that the microvibration of an existing integrated circuit (IC) fab structure plays an important role in affecting the chip probe yield of manufacturing and the reliability of chip products, the paper has emphasized on the microvibration analysis and measurement of a test structure before and after the seismic protective systems have been incorporated. The theoretical background of one-third octave frequency spectra is derived. Based on the study, it is found that the incorporation of viscous dampers will not only enhance the seismic safety but also minimize the microvibration of the structure. The seismic isolation design is the most promising method to achieve the “fully operational” seismic performance level of an IC fab. However, the amplification of the microvibration at the low frequency range due to the implementation of seismic isolation design will require further study to ascertain its effect on the operation of vibration-sensitive facilities.
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References
1.
Amick, H., and Bayat, H. (2001). “Meeting the vibration challenges of next-generation photolithography tools.” Proc., 47th Annual Technical Meeting, Institute of Environmental Sciences and Technology, Phoenix, 1–10.
2.
Anderson, J.S., and Bratos-Anderson, M. (1993). Noise—its measurement, analysis, rating and control, Ashgate Publishing Company, Brookfield, Vt.
3.
Acoustical Society of America ( 1993). “Specifications for octave-band and fractional-octave-band analog and digital filters.” ANSI S1.1-1986 ASA65-1986, New York.
4.
Applied Technology Council (ATC). (1996). “Seismic evaluation and retrofit of concrete buildings.” ATC-40, Redwood City, Calif.
5.
Chung, L.L., Wang, Y.P., and Lee, J.L. (2002). “Measurement and analysis of micro-vibration of high-tech industrial plants.” Proc., Workshop on Seismic Protection and Micro-vibration Control of High-Tech Industrial Structures, National Center for Research on Earthquake Engineering, Taipei, Taiwan, 23–41.
6.
Department of Interior (1996). “Seismic design specifications for building structures.” Taipei, Taiwan (in Chinese).
7.
Gordon, C.G. (1991). “Generic criteria for vibration-sensitive equipment.” Proc., Int. Society for Optical Engineering, Vol. 1619, San Jose, Calif., 71–85.
8.
Gordon, C.G. (1999). Generic criteria for vibration-sensitive equipment, Colin Gordon & Associates, San Mateo, Calif.
9.
Hwang, J. S., and Hsu, T. Y. (2000). “Experimental study of an isolated building subjected to triaxial ground excitations.” J. Struct. Eng., 126(8), 879–886.
10.
Hwang, J.S., Huang, Y.N., and Hung, Y.H. (2002). “Experimental and analytical study of a structure with supplemental nonlinear viscous dampers.” Rep. No. NCREE-02-020, National Center for Research on Earthquake Engineering, Taipei, Taiwan.
11.
International Standards Organization (ISO). (1981). “Guide to the evaluation of human exposure to vibration and shock in buildings (1 Hz–80 Hz).” Draft Proposal ISO 2631/DAD1, Geneva, Switzerland.
12.
Seleemah, A.A., and Constantinou, M.C. (1997). “Investigation of seismic response of buildings with linear and nonlinear fluid viscous dampers.” NCEER Rep. No. 97-0004, National Center for Earthquake Engineering Research, State Univ. of New York at Buffalo, Buffalo, N. Y.
13.
Structural Engineers Association of California (1995). Performance based seismic engineering of buildings, Sacramento, Calif.
14.
Wirsching, P.H., Paez, T.L., and Ortiz, K. (1995). Random vibrations, J Wiley, New York.
Information & Authors
Information
Published In
Journal of Structural Engineering
Volume 130 • Issue 11 • November 2004
Pages: 1676 - 1684
Copyright
Copyright © 2004 ASCE.
History
Published online: Oct 15, 2004
Published in print: Nov 2004
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