Electrocoagulation of Silica Nanoparticles in Wafer Polishing Wastewater by a Multichannel Flow Reactor: A Kinetic Study
Publication: Journal of Environmental Engineering
Volume 132, Issue 12
Abstract
A simplistic and systematic procedure has been developed for the design and upscaling of a multichannel, continuous-flow electrocoagulation reactor of monopolar configuration for the removal of submicron particles from wastewater. Using wastewater generated from the chemical-mechanical planarization process as the target wastewater, a series of laboratory-scale studies were conducted to determine the required operating conditions for the efficient removal of the ultrafine silica particles. These operating criteria included charge loading , current density , hydraulic retention time , as well as the initial pH (7–10). Furthermore, a steady-state transport equation with second-order reaction kinetics was employed to describe the rate of coagulation as the rate-limiting factor. The actual kinetic constant determined from the laboratory-scale experiments was approximately , which was three orders of magnitude smaller than that calculated based on Brownian coagulation. The model was subsequently validated with a series of experiments using a pilot-scale electrocoagulation reactor geometrically similar to the laboratory-scale reactor with nearly 20 times volumetric scaleup.
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Acknowledgments
The writers are grateful for the financial support from the Winbond Electronics Corp., and the experimental assistance by Mr. P.-T. Lin and Mr. H.-C. Ke of the Graduate Institute of Environmental Engineering at the National Chiao Tung University.
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© 2006 American Society of Civil Engineers.
History
Received: Apr 27, 2005
Accepted: May 10, 2006
Published online: Dec 1, 2006
Published in print: Dec 2006
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