Codes and Standards Resource Tool for Advanced Technology Facilities

To assist in understanding the impact of codes and standards on advanced technology facilities, CREATE, a research consortium at Arizona State University, has developed a Codes and Standards Resource Tool that compiles all the major codes and standards used in the semiconductor industry for the design and construction of a semiconductor fabrication facility. This resource tool is web-based to allow access to the information at any time and any place. Links to other pertinent websites are provided to allow access to related material on various cleanroom and semiconductor issues to improve the design and construction process. A compendium of alternative means and methods is also available that will assist the design and construction team when it is difficult or impossible to comply with the codes exactly as prescribed and an alternate means of compliance must be found.