Uncertainty Analysis in Surface Micromachined Force Gauges: Convex Model Approach
Publication: Journal of Aerospace Engineering
Volume 17, Issue 1
Abstract
The paper presents a general framework for analyzing uncertainties in material and geometrical properties of a microforce gauge. Since fabrication of the microgauge is surface micromachining of microelectromechanical systems (MEMS), it has inherent variations that lead to both material and geometrical uncertainties. A convex model is used as a tool for addressing uncertainties in microforce gauge analysis. Mathematical derivations of convex models are presented and advantages of the convex approach over the standard statistical and probability approach in analyzing uncertainty in MEMS devices is highlighted.
Get full access to this article
View all available purchase options and get full access to this article.
References
Attoh-Okine, N.(2002). “Uncertainty analysis in structural number determination in flexible pavement design: A convex model approach.” Build. Construct. Mater.,16, 67–71.
Ben-Haim, Y., and Elishakoff, I. (1990). Convex models of uncertainty in applied mechanics, Elsevier, New York.
de Boer, M. P., Knapp, J. M., and Michalske, T. A. (1998). “Adhesion, adhesion hysteresis and friction in MEMS under controlled humidity ambients.” 1998 ASME Conf., Symp. on Microscale Mechanics of Materials and Structures, ASME, Reston, Va.
Elishakoff, I., Elisseeff, P., and Glegg, S. A.(1994). “Nonprobabilistic convex-theoretic modeling of scatter in material properties.” AIAA J., 32(4), 843–849.
Elseifi, M. A., Gurdal, Z., and Nikolaidis, E.(1999). “Convex/probabilistic models of uncertainties in geometric imperfections of stiffened composite panels.” AIAA J., 37(4), 468–474.
Gromm, T., Howell, L., and Selfridege, R.(2002). “In-plane linear displacement bistable microrelay.” J. Micromech. Microeng., 12, 257–264.
Kim, T., and Sin, H.(2001). “Optimal design of composite laminated plates with the discreteness in ply angles and uncertainty in material properties considered.” Comput. Struct., 79, 2501–2509.
Lindberg, H. E.(1992). “An evaluation of convex modeling for multimode dynamic buckling.” J. Appl. Mech., 59, 929–936.
Liu, Z. S., Chen, S. H., and Han, W. Z.(1994). “Solving the extremum of static response for structural systems with unknown-but-bounded parameters.” Comput. Struct., 50(4), 557–561.
Pantelides, C.(1995). “Buckling of elastic columns using convex model of uncertain springs.” J. Eng. Mech., 121(7), 837–844.
Pantelides, C. P., and Booth, B.(2000). “Computer-aided design of optimal structures with uncertainty.” Comput. Struct., 74, 293–307.
Pantelides, C. P., and Gazerli, S.(1998). “Design of trusses under uncertain loads using convex models.” J. Eng. Mech., 124(3), 318–329.
Suzuki, Y. (1996). “Flexible microgripper and its application to micro-measurement and thermal properties.” MEMS: Proc., IEEE Micro Electro Mechanical Systems, 406–411.
Tzan, S., and Pantelides, C. P.(1996). “Convex models for impulsive response of structures.” J. Eng. Mech., 122(6), 521–529.
Wittwer, J., Gromm, T., and Howell, L.(2002). “Surface micromachined force gauges: uncertainty and reliability.” J. Micromech. Microeng., 12, 13–20.
Xiong, X., Zou, Q., Lu, D., and Wang, W.(1998). “Balance-approach for load displacement measurement of microstructure.” Mechatronics, 8, 549–559.
Yi, T., and Kim, C.(1999). “Measurement of mechanical properties for MEMS materials.” Meas. Sci. Technol., 10, 706–716.
Zhou, Y., Nelson, B., and Vikramadita, B.(2000). “Integrating optical force sensing and with virtual serving for microassembly.” J. Intell. Robotic Syst., 28, 259–276.
Information & Authors
Information
Published In
Journal of Aerospace Engineering
Volume 17 • Issue 1 • January 2004
Pages: 40 - 44
Copyright
Copyright © 2004 American Society of Civil Engineers.
History
Received: Aug 26, 2002
Accepted: Sep 3, 2003
Published online: Dec 15, 2003
Published in print: Jan 2004
Authors
Metrics & Citations
Metrics
Citations
Download citation
If you have the appropriate software installed, you can download article citation data to the citation manager of your choice. Simply select your manager software from the list below and click Download.