Integrated Microelectromechanical Gyroscopes
Publication: Journal of Aerospace Engineering
Volume 16, Issue 2
Abstract
Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.
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Information & Authors
Information
Published In
Journal of Aerospace Engineering
Volume 16 • Issue 2 • April 2003
Pages: 65 - 75
Copyright
Copyright © 2003 American Society of Civil Engineers.
History
Received: Nov 27, 2002
Accepted: Nov 27, 2002
Published online: Mar 14, 2003
Published in print: Apr 2003
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