Nonlocal Thermoelastic Damping in Microelectromechanical Resonators
Publication: Journal of Engineering Mechanics
Volume 135, Issue 3
Abstract
The evaluation of loss mechanisms in microscale mechanical resonators is addressed. Among various dissipation causes, thermoelastic loss is considered as a fundamental dissipation mechanism in microbeam resonators packed in a near-vacuum environment. However, the standard thermoelastic analysis is unable to interpret the size effect experimentally evidenced in resonators when the dimensions become very small, below several microns. In this paper we propose an enhanced nonlocal thermoelastic model, based on a thermodynamical formulation, which incorporates internal characteristic material lengths. Analytical results obtained with this nonlocal theory are compared with experimental results reported in the literature. It is shown how nonlocality can better interpret the observed behavior, at least in a certain range of resonators dimensions.
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Acknowledgments
The contribution of EU NoE Design for Micro and Nano Manufacture (Patent DfMM), Contract No. 509255 is gratefully acknowledged. The first writer wishes to thank Cariplo Foundation for the financial support of the project Innovative Models for the Study of the Behaviour of Solids and Fluids in Micro/Nano Electromechanical Systems.
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Information & Authors
Information
Published In
Journal of Engineering Mechanics
Volume 135 • Issue 3 • March 2009
Pages: 214 - 220
Copyright
© 2009 ASCE.
History
Received: Sep 5, 2007
Accepted: Aug 11, 2008
Published online: Mar 1, 2009
Published in print: Mar 2009
Notes
Note. Associate Editor: George Z. Voyiadjis
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